We are aiming at integration of mechanical, electrical and optical functions in a small domain; for example on a silicon chip and a film, by means of micro-nano machining technologies. In-depth research on micromachining processes such as etching and deposition allows us to fabricate novel MEMS (Micro-Electro-Mechanical Systems) devices, including sensors and actuators. Through these activities, we are contributing to the establishment of the knowledge base for MEMS technology, and to produce novel MEMS devices.